1. Exploring the mechanical properties of nanometer-thick elastic films through micro-drop impinging on large-area suspended graphene

    Yu-Tzu Liao; Shiuan-Ying Peng; Kai-Wen Chuang; Ying-Chih Liao; Yasuhiro Kuramitsu; Wei-Yen Woon
    Nanoscale, 2022,14, 42-48 ; https://doi.org/10.1039/D1NR05918A

  2. Rapid thermal process driven intra-die device variations

    C.H. Tsai; M. Aboy; L. Pelaz; Y.H. Hsu; W.Y. Woon; P.J. Timans; C.K. Lee
    Volume 152, December 2022, 107052 ; https://doi.org/10.1016/j.mssp.2022.107052

  3. Growth Mechanism of High-Quality hBN Monolayers on Cu through Chemical Vapor Deposition with Inductively Coupled Plasma

    Wei-Yu Huang; Ching-Lin Hsieh; Yu-Liang Chien; Chien-Sheng Kao; Hsu-Sheng Tsai; Wei-Yen Woon
    J. Phys. Chem. C 2022, 126, 50, 21287–21296 ; https://doi.org/10.1021/acs.jpcc.2c05977

  4. Efficient and stable activation by microwave annealing of nanosheet silicon doped with phosphorus above its solubility limit

    Chun-Hsiung Tsai; Chandrashekhar P. Savant; Mohammad Javad Asadi; Yu-Ming Lin; Ivan Santos; Yu-Hsiang Hsu; Jeffrey Kowalski; Lourdes Pelaz; Wei-Yen Woon; Chih-Kung, and James C. M. Hwang
    Appl. Phys. Lett. 121, 052103 (2022) ; https://doi.org/10.1063/5.0099083

  5. Variations in the Effective Work Function of Graphene in a Sliding Electrical Contact Interface under Ambient Conditions

    Shuei-De Huang; En-De Chu; Yu-Han Wang; Jhe-Wei Liou; Ruei-Si Wang; Wei-Yen Woon;Hsiang-Chih Chiu
    ACS Appl. Mater. Interfaces 2022, 14, 23, 27328–27338 ; https://doi.org/10.1021/acsami.2c02096

  6. Using Exciton/Trion Dynamics to Spatially Monitor the Catalytic Activities of MoS 2 during the Hydrogen Evolution Reaction

    Fu-He Hsiao, Cheng-Chu Chung, Chun-Hao Chiang, Wei-Neng Feng, Wen-Yen Tzeng, Hung-Min Lin, Chien-Ming Tu, Heng-Liang Wu, Yu-Han Wang, Wei-Yen Woon, Hsiao-Chien Chen, Ching-Hsiang Chen, Chao-Yuan Lo, Man-Hong Lai, Yu-Ming Chang, Li-Syuan Lu, Wen-Hao Chang, Chun-Wei Chen*, and Chih-Wei Luo
    ACS Nano 2022, 16, 3, 4298–4307 ; https://doi.org/10.1021/acsnano.1c10380

  7. Robustness of large-area suspended graphene under interaction with intense laser

    Y. Kuramitsu, T. Minami, T. Hihara, K. Sakai, T. Nishimoto, S. Isayama, Y. T. Liao, K. T. Wu, W. Y. Woon, S. H. Chen, Y. L. Liu, S. M. He, C. Y. Su, M. Ota, S. Egashira, A. Morace, Y. Sakawa, Y. Abe, H. Habara, R. Kodama, L. N. K. Döhl, N. Woolsey, M. Koenig, H. S. Kumar, N. Ohnishi, M. Kanasaki, T. Asai, T. Yamauchi, K. Oda, Ko. Kondo, H. Kiriyama & Y. Fukuda
    Scientific Reports volume 12, 2346 (2022) ; https://doi.org/10.1038/s41598-022-06055-4

  8. Exploring the mechanical properties of nanometer-thick elastic films through micro-drop impinging on large-area suspended graphene

    Yu-Tzu Liao, Shiuan-Ying Peng, Kai-Wen Chuang, Ying-Chih Liao, Yasuhiro Kuramitsuc and Wei-Yen Woon
    Nanoscale, 2022,14, 42-48 ; https://doi.org/10.1039/D1NR05918A

  9. Photoluminescence Enhancement in WS2 Nanosheets Passivated with Oxygen Ions: Implications for Selective Area Doping

    Yu-Han Wang, Hsin-Mei Ho, Xuan-Long Ho, Li-Syuan Lu, Shang-Hsien Hsieh, Shuei-De Huang, Hsiang-Chih Chiu, Chia-Hao Chen, Wen-Hao Chang, Jonathon David White, Yu-Hui Tang, and Wei-Yen Woon
    ACS Appl. Nano Mater. 2021, 4, 11, 11693–11699 ; https://doi.org/10.1021/acsanm.1c02265

  10. Effect of hydrogen implantation on low-temperature activation of boron in silicon

    Jui-Chang Lin, Bo-Wen Lee, Ruey-Dar Chang, Che-Men Chu, and Wei-Yen Woon
    Volume 505, 15 October 2021, Pages 58-63 ; https://doi.org/10.1016/j.nimb.2021.08.009

  11. Discriminative detection of laser-accelerated multi-MeV carbon ions utilizing solid state nuclear track detectors

    Takamasa Hihara, Masato Kanasaki, Takafumi Asai, Tamon Kusumoto, Satoshi Kodaira, Hiromitsu Kiriyama, Keiji Oda, Tomoya Yamauchi, Wei-Yen Woon, Yasuhiro Kuramitsu & Yuji Fukuda
    scientific Reports volume 11, 16283 (2021) ; https://doi.org/10.1021/acsphotonics.1c00611

  12. Controlling the Electron Concentration for Surface-Enhanced Raman Spectroscopy

    Thi Anh Nguyet Nguyen, Ying-Lung Yu, Ya Chien Chang, Yu-Han Wang, Wei-Yen Woon, Chien-Ting Wu, Kun-Lin Lin, Cheng-Yi Liu, Fan-Ching Chien, and Kun-Yu Lai
    ACS Photonics 2021, 8, 8, 2410–2416 ; https://doi.org/10.1038/s41598-021-92300-1

  13. Achieving junction stability in heavily doped epitaxial Si:P

    C.H.Tsai, Y.H.Hsu, I.Santos, L.Pelaz, J.E.Kowalski, J.W.Liou, W.Y.Woon, C.K.Lee
    Volume 127, 1 June 2021, 105672 ; https://doi.org/10.1016/j.mssp.2021.105672

  14. Graphene under extreme electromagnetic field: energetic ion acceleration by direct irradiation of ultra intense laser on few layer suspended graphene

    Yasuhiro Kuramitsu, Takumi Minami, Takamasa Hihara, Kentaro Sakai, Takahiro Nishimoto, Shogo Isayama, Yu-Tzu Liao, Kuan-Ting Wu, Wei-Yen Woon, Shih-Hung Chen, Yao-Li Liu, Shi-Ming He, Ching-Yuan Su, Masato Ota, Shunsuke Egashira, Alessio Morace
    Research Square 17 June 2021, PREPRINT (Version 1) ; https://doi.org/10.21203/rs.3.rs-373515/v1

  15. Temperature Effect of Low-Damage Plasma for Nitrogen-Modification of Graphene

    Ming-Hsiu Tsai, Chun-Hsuan Lin, Wei-Tong Chen, Chi-Hsien Huang, Wei-Yen Woon, and Chih-Ting Lin
    Solid State Sci. Technol. 9 121007 (2020) ; https://doi.org/10.1149/2162-8777/abcf15

  16. Electrical Tunable PVDF/Graphene Membrane for Controlled Molecule Separation

    Wei-Song Hung, Szu-Ying Ho, Yu-Hsuan Chiao, Chia-Chun Chan, Wei-Yen Woon, Ming-Jie Yin, Ching-Yuan Chang, Young Moo Lee, and Quan-Fu An
    Chem. Mater. 2020, 32, 13, 5750–5758 ; https://doi.org/10.1021/acs.chemmater.0c01547

  17. Growth of twisted bilayer graphene through two-stage chemical vapor deposition

    Che-Men Chu, Wei-Yen Woon
    Nanotechnology 31, 435603 (2020) ; https://doi.org/10.1088/1361-6528/aba39e

  18. Roles of Structural and Chemical Defects in Graphene on Quenching of Nearby Fluorophores

    Yu-Han Wang, Xuan-Long Ho, Shang-Hsien Hsieh, Chia-Hao Chen, Jonathon David White, Wei-Yen Woon
    Carbon 165, 412-420 (2020); https://doi.org/10.1016/j.carbon.2020.04.067

  19. A mechanistic study of molecular CO2 interaction and adsorption on carbon implanted SnS2 thin film for photocatalytic CO2 reduction activity

    Tadesse Billo, Indrajit Shown, Aswin kumar Anbalagan, Tirta Amerta Effendi, AmrSabbah, Fang-Yu Fu, Che-Men Chu, Wei-Yen Woon, Ruei-San Chen, Chih-Hao Lee, Kuei-Hsien Chen.Li-Chyong Chen
    Nano Energy 72, 104717 (2020); https://doi.org/10.1016/j.nanoen.2020.104717

  20. Giant defect emission enhancement from ZnO nanowires through desulfurization process

    Junze Zhou, Komla Nomenyo, Clotaire Chevalier Cesar, Alain Lusson, Adam Schwartzberg, Chun-Chieh Yen, Wei-Yen Woon, Gilles Lerondel
    Sci Rep 10, 4237 (2020); https://doi.org/10.1038/s41598-020-61189-7

  21. Characteristics of Graphene Grown through Low Power Capacitive Coupled Radio Frequency Plasma Enhanced Chemical Capor Deposition

    Yu-Chen Chang, Chun-Chieh Yen, Hung-Chieh Tsai, Tsung Cheng Chen, Chia-Ming Yang, Chia-Hao Chen, Wei-Yen Woon
    Carbon 159 (2020) 570-578; https://doi.org/10.1016/j.carbon.2019.12.093

  22. Revisiting Oxidation Scanning Probe Lithography of Graphene: Balance of Water Condensation Energy and Electrostatic Energy

    Jhe-Wei Liou, Wei-Yen Woon
    J. Phys. Chem. C 2019, 123, 41, 25422-25427; https://doi.org/10.1021/acs.jpcc.9b04175

  23. Effects of π-Electron in Humidity Sensing of Artificially Stacked Graphene Bilayers Modified with Carboxyl and Hydroxyl Groups

    Chun-Hsuan Lin, Wei-Tong Chen, Chi-Hsien Huang, Wei-Yen Woon, Chih-Ting Lin
    Sensors and Actuators B: Chemical 154 (2019) 420-427; https://doi.org/10.1016/j.snb.2019.127020

  24. Spectroscopic and Electrical Characterizations of Low-Damage Phosphorous-Doped Graphene via Ion Implantation

    Shih-Ming He, Cheng-Chun Huang, Jhe-Wei Liou, Wei-Yen Woon, Ching-Yuan Su
    ACS Appl. Mater. Interfaces 2019, 11, 50, 47289-47298; https://doi.org/10.1021/acsami.9b18479

  25. Nucleation and growth dynamics of graphene grown through low power capacitive coupled radio frequency plasma enhanced chemical vapor deposition

    Chun-Chieh Yen,Yu-Chen Chang, Hung-Chieh Tsai, Wei-Yen Woon
    Carbon 154 (2019) 420-427; https://doi.org/10.1016/j.carbon.2019.08.042

  26. Ion implantation of graphene with keV carbon ions: Defect types, evolution and substrate effects

    Wei-Jhih Huang, Wei-Yen Woon
    Vacuum 166, 72 (2019); https://doi.org/10.1016/j.vacuum.2019.04.058

  27. A low-damage plasma surface modification method of stacked graphene bilayers for configurable wettability and electrical properties

    Chun-Hsuan Lin, Ming-Shiu Tsai, Wei-Tong Chen, Yi-Zhe Hong, Po-Yu Chien, Chi-Hsien Huang, Wei-Yen Woon and Chih-Ting Lin
    Nanotechnology 30 245709 (2019); https://doi.org/10.1088/1361-6528/ab0511

  28. Frictional characteristics of nano-confined water mediated hole-doped single-layer graphene on silica surface

    En-De Chu, Po-Hsiang Wang, Yi-Zhe Hong, Wei-Yen Woon, Hsiang-Chih Chiu
    Nanotechnology 30 (2019) 045706; https://doi.org/10.1088/1361-6528/aaed5b

  29. Entrapment of pusher and puller bacteria near a solid surface

    Kuan-Ting Wu, Yi-Teng Hsiao, Wei-Yen Woon
    Phys. Rev. E 98, 052407; https://doi.org/10.1103/PhysRevE.98.052407

  30. Enhancing Cancer Cell Collective Motion and Speeding up Confluent Endothelial Dynamics through Cancer Cell Invasion and Aggregation

    Hsiang-Ying Chen, Yi-Teng Hsiao, Shu-Chen Liu, Tien Hsu, Wei-Yen Woon, and Lin I
    Phys. Rev. Lett. 121, 018101 (2018); https://doi.org/10.1103/PhysRevLett.121.018101

  31. MEH-PPV photophysics: insights from the influence of a nearby 2D quencher

    Long Ho Xuan1, Yu-Han Wang, Po-Jui Chen, Wei-Yen Woon, Jonathon David White
    Accepted Manuscript online 15 November 2018; https://doi.org/10.1088/1361-6528/aaf148

  32. Structural Reconstruction of Reduced Graphene

    Yu-Han Wang, Yi-Zhe Hong, Lo-Yueh Chang, Chia-Hao Chen, Wei-Yen Woon
    J. Phys. Chem. C, 2018, 122 (27), pp 15786–15791; https://doi.org/10.1021/acs.jpcc.8b04937

  33. Nucleation and growth kinetics of multi-layered graphene on copper substrate

    Chia-Chun Chan, Wen-Liang Chung, Wei-YenWoon
    Carbon 135 (2018) 118-124; https://doi.org/10.1016/j.carbon.2018.04.044

  34. Photoluminescence Characteristics of Multilayer HfSe2 Synthesized on Sapphire Using Ion Implantation

    Hsu-Sheng Tsai, Jhe-Wei Liou, Icuk Setiyawati, Kuan-Rong Chiang, Chia-Wei Chen, Chi-Chong Chi, Yu-Lun Chueh, Hao Ouyang, Yu-Hui Tang, Wei-Yen Woon, Jenq-Horng Liang
    Adv. Mater. Interfaces 2018, 1701619; https://doi.org/10.1002/admi.201701619

  35. Reduction-oxidation dynamics of oxidized graphene: Functional group composition dependent path to reduction

    Yi-Zhe Hong, Hung-Chieh Tsai, Yu-Han Wang, Jukka Aumanen, Pasi Myllyperkiö, Andreas Johansson, Yen-Chien Kuo, Lo-Yueh Chang, Chia-Hao Chen, Mika Pettersson*, Wei-Yen Woon*
    Carbon 129 (2018) 396-402; https://doi.org/10.1016/j.carbon.2017.12.047

  36. Optical Forging of Graphene into Three-Dimensional Shapes

    Andreas Johansson, Pasi Myllyperkiö, Pekka Koskinen, Jukka Aumanen, JuhaTapio Koivistoinen, Hung-Chieh Tsai, Chia-Hao Chen, Lo-Yueh Chang, VesaMatti Hiltunen, Jyrki Manninen, Wei-Yen Woon, and Mika Pettersson
    Nano Lett., 2017, 17 (10), pp 6469–6474; https://doi.org/10.1021/acs.nanolett.7b03530

  37. Synthesis of Ultrathin Composition Graded Doped Lateral WSe2/WS2 Heterostructures

    Zhipeng Li, Jialu Zheng, Yupeng Zhang, Changxi Zheng, Wei-Yen Woon, Min-Chiang, Chuang, Hung-Chieh Tsai, Chia-Hao Chen, Asher Davis, Zaiquan Xu, Jiao Lin, Han Zhang, Qiaoliang Bao
    ACS Appl. Mater. Interfaces, 2017, 9 (39), pp 34204–34212; https://doi.org/10.1021/acsami.7b08668

  38. Local oxidation and reduction of graphene

    Yi-Zhe Hong, Wei-Huan Chiang, Hung-Chieh Tsai, Min-Chiang Chuang, Yen-Chien Kuo, Lo-Yueh Chang, Chia-Hao Chen, Jonathon David White and Wei-Yen Woon
    Nanotechnology, Volume 28, Number 39; http://iopscience.iop.org/article/10.1088/1361-6528/aa802d

  39. Large-area suspended graphene as a laser target to produce an energetic ion beam

    Nur Khasanah, Nima Bolouki, Tzu-Yao Huang, Yi-Zhe Hong, Wen-Liang Chung, Wei-Yen Woon, Ching-Yuan Su, and Yasuhiro Kuramitsu
    High Power Laser Science and Engineering 5, e18 (2017); https://doi.org/10.1017/hpl.2017.16

  40. Fluorescence Lifetime, Dipole Orientation and Bilayer Polymer Films

    XuanLong Ho, Po-JuiChen, Wei-Yen Woon, Jonathon David White
    Chemical Physics Letters, Article in press (2017); https://doi.org/10.1016/j.cplett.2017.08.027

  41. Vertical Al2Se3/MoSe2 heterojunction on sapphire synthesized using ion beam

    Hsu-Sheng Tsai, Jhe-Wei Liou, Yi-Chung Wang, Chia-Wei Chen, Yu-Lun Chueh, Ching-Hung Hsiao, Hao Ouyang, Wei-Yen Woon and Jenq-Horng Liang
    RSC Adv.,7, 10154-10157 (2017); http://dx.doi.org/10.1039/C6RA28273C

  42. Chemical composition of two-photon oxidized graphene

    Andreas Johansson, Hung-Chieh Tsai, Jukka Aumanen, Juha Koivistoinen, Pasi Myllyperkiő, Yi-Zhe Hung, Min-Chiang Chuang, Chia-Hao Chen, Wei Yen Woon, Mika Pettersson
    Carbon 115 77-82 (2017); http://dx.doi.org/10.1016/j.carbon.2016.12.091

  43. Formation of p-type ZnO thin film through co-implantation

    Yao-Teng Chuang, Jhe-Wei Liou and Wei-Yen Woon
    Nanotechnology 28 035603 (2017); http://dx.doi.org/10.1088/1361-6528/28/3/035603

  44. Contact Angle Hysteresis on Graphene Surfaces and Hysteresis-free Behavior on Oil-infused Graphite Surfaces

    Cyuan-Jhang Wu, Yueh-Feng Li, Wei-Yen Woon, Yu-Jane Sheng, Heng-Kwong Tsao
    Applied Surface Science 385, 153 (2016); http://dx.doi.org/10.1016/j.apsusc.2016.05.059

  45. Impurity-tuned non-equilibrium phase transition in a bacterial carpet

    Yi-Teng Hsiao, Kuan-Ting Wu, Nariya Uchida and Wei-Yen Woon
    Appl. Phys. Lett. 108, 183701 (2016); http://dx.doi.org/10.1063/1.4948766

  46. Nucleation and growth dynamics of graphene on oxygen exposed copper substrate

    Min-Chiang Chuang, Wei-Yen Woon
    Carbon 103, 384 (2016); http://dx.doi.org/10.1016/j.carbon.2016.03.049

  47. Suppression of transient enhanced diffusion in sub-micron patterned silicon template by dislocation loops formation

    Kuan-Kan Hu, Ruey-Dar Chang and Wei Yen Woon
    AIP Advances 5, 107128(2015); http://dx.doi.org/10.1063/1.4934674

  48. Graphene reduction dynamics unveiled

    Hung-Chieh Tsai, Hung-Wei Shiu, Min-Chiang Chuang, Chia-Hao Chen, Ching-Yuan Su, Jonathon David White, Wei Yen Woon
    2D Mater. 2, 031003(2015); http://dx.doi.org/10.1088/2053-1583/2/3/031003

  49. Towards the continuous production of high crystallinity graphene via electrochemical exfoliation with molecular in-situ encapsulation

    Chia-Hsuan Chen, Shiou-Wen Yang, Min-Chiang Chuang, Wei-Yen Woon, Ching Yuan Su
    Nanoscale 07(2015); http://dx.doi.org/10.1039/C5NR03669K

  50. Revisiting the role of strain in solid-phase epitaxial regrowth of ion-implanted silicon

    Kuan-Kan Hu, Shin-Yang Liang and Wei Yen Woon
    Appl. Phys. Express 8, 021302 (2015); http://dx.doi.org/10.7567/APEX.8.021302

  51. Collective flow dynamics across a bacterial carpet: Understanding the forces generated

    Yi-Teng Hsiao, Jing-Hui Wang, Kuan-Ting Wu, Jengjan Tsai, Cheng-Hung Chang and Wei-Yen Woon
    Appl. Phys. Lett. 105, 203702 (2014); http://dx.doi.org/10.1063/1.4902111

  52. On the nature of defects created on graphene by scanning probe lithography under ambient conditions

    Hsiao-Mei Chien, Min-Chiang Chuang, Hung-Chieh Tsai, Hung-Wei Shiu, Lo-Yueh Chang, Chia-Hao Chen, Sheng-Wei Lee, Jonathon David White, Wei-Yen Woon
    Carbon 80 318 – 324 (2014); DOI: 10.1016/j.carbon.2014.08.070

  53. On the doping limit for strain stability retention in phosphorus doped Si:C

    Yao-Teng Chuang, Kuan-Kan Hu and Wei-Yen Woon
    J. Appl. Phys. 116, 033503 (2014); http://dx.doi.org/10.1063/1.4890303

  54. Characteristics of carbon monoxide sensors made by polar and nonpolar zinc oxide nanowires gated AlGaN/GaN high electron mobility transistor

    S. C. Hung, W. Y. Woon, S. M. Lan, F. Ren, S. J. Pearton
    Appl. Phys. Lett. 103, 083506 (2013); http://dx.doi.org/10.1063/1.4818671 (4 pages)

  55. Carbon re-incorporation in phosphorus-doped Si1−yCy epitaxial layers during thermal annealing

    Hung-Tai Chang, I-Ping Lin, Sheng-Chen Twan, Wei-Yen Woon, Sheng-Wei Lee
    Journal of Alloys and Compounds Volume 553, 15 March 2013, Pages 30–34 ; dx.doi.org/10.1016/j.jallcom.2012.10.158

  56. Local anodic oxidation kinetics of chemical vapor deposition-grown graphene supported on a thin oxide buffered silicon template

    Min-Chiang Chuang, Hsiao-Mei Chien, Yuan-Hong Chain, Gou-Chung Chi, Sheng-Wei Lee, Wei-Yen Woon
    Carbon Volume 54, April 2013, Pages 336–342 ; dx.doi.org/10.1016/j.carbon.2012.11.045

  57. Surface relief terraces and self-assembled nanostructures in thin block copolymer films with solvent annealing

    Zhen-Yuan Guo, Mei-Syun Lin, Yang-Ting Chang, Ya-Sen Sun, Yeo-Wan Chiang, Chung-Yi Chou, Wei-Yen Woon, Min-Chiang Chuang
    Polymer Volume 53, Issue 21, 28 September 2012, Pages 4827–4833 ; dx.doi.org/10.1016/j.polymer.2012.08.051

  58. Rapid polymer microchannel fabrication by hot roller embossing process

    Chia-Wen Tsao, Tzug-Yi Chen, Wei-Yen Woon, and Chien-Jung Lo
    Microsystem Technologies, 18, 713 (2012)

  59. Thermal instability of pseudomorphically strained phosphorus doped Si:C alloy

    Wei-Yen Woon*, Yao-Teng Chuang, and Sheng-Hao Wang
    Nucl. Instrum. Meth. B, 282, 85 (2012) ; dx.doi.org/10.1016/j.nimb.2011.08.045

  60. Collective sub-diffusive dynamics in bacterial carpet microfluidic channel

    Yi-Teng Hsiao, Jing-Hui Wang, Yi-Chun Hsu, Chien-Chun Chiu, Chien-Jung Lo, Chia-Wen Tsao, and Wei Yen Woon
    Appl. Phys. Lett. 100, 203702 (2012); http://dx.doi.org/10.1063/1.4720072 (3 pages)

  61. Effect of impurities on thermal stability of pseudomorphically strained Si:C layer

    Yao-Teng Chuang, Sheng-Hao Wang, and Wei-Yen Woon
    Appl. Phys. Lett. 98, 141918 (2011); http://dx.doi.org/10.1063/1.3572339 (3 pages)

  62. Strain-doping coupling dynamics in phosphorus doped Si:C formed by solid phase epitaxial regrowth

    W. Y. Woon (溫偉源), S. H. Wang (王聖豪), Y. T. Chuang (莊曜滕), M. C. Chuang (莊敏強), and C. L. Chen (陳佳伶)
    Appl. Phys. Lett. 97, 141906 (2010); doi:10.1063/1.3497195 (3 pages)

  63. Impact of ion implantation boundary dimensionality on boron transient diffusion in submicron scale patterns

    Wei Yen Woon (溫偉源) and Chia Ling Chen (陳佳伶)
    Appl. Phys. Lett. 97, 121907 (2010); doi:10.1063/1.3492840 (3 pages)